Chip, method for manufacturing chip, and electronic device
AssigneeHuawei Technologies Co., Ltd.
InventorsYuan Chang, Yuan Yao, Woeiji Song, Jeffrey Junhao Xu
Life of this patent
Estimating the term…
Loading patent…
AssigneeHuawei Technologies Co., Ltd.
InventorsYuan Chang, Yuan Yao, Woeiji Song, Jeffrey Junhao Xu
Estimating the term…
This disclosure provides example chips. One example chip includes a transistor, a metal silicide layer, an etching stop layer, an interlayer dielectric layer, a plurality of first contact holes, and a barrier layer. The transistor includes a source and a drain, the metal silicide layer is disposed at least on the source and the drain, each of the plurality of first contact holes penetrates the etching stop layer and the interlayer dielectric layer, the source overlaps with a first orthographic projection that is of at least one first contact hole in the plurality of first contact holes and that is on a substrate, and the drain overlaps with a second orthographic projection that is of at least one first contact hole in the plurality of first contact holes and that is on the substrate.
A chip, comprising:
A method for manufacturing a chip, comprising:
An electronic device, comprising a circuit board and a chip, wherein the chip is disposed on the circuit board, wherein the chip comprises a transistor, a metal silicide layer, an etching stop layer, an interlayer dielectric layer, a plurality of first contact holes that are sequentially stacked, and a barrier layer, wherein:
Dependencies are inferred from the claim text.