Device

Abstract

The purpose of the present disclosure is to provide a device capable of efficiently performing cooling of an antenna. The device of the present disclosure is characterized by comprising a housing, a first container provided inside the housing and capable of maintaining a depressurized state, a second container provided inside the first container to house an item to be processed, an antenna space portion provided inside the second container and composed of a member a part of which transmits a microwave, an antenna provided inside the antenna space portion to emit a microwave, and an opening portion provided in the antenna space portion, wherein the antenna is connected to a high-frequency oscillation circuit via a transmission line, and the opening portion is a hole penetrating through the first container and the second container to provide communication between the housing and the antenna space portion.

Dependencies are inferred from the claim text.