Integral resistance heaters including niobium and processes for making same
AssigneeMaterion Corporation
InventorLarry T. SMITH
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Abstract
Disclosed is a process of forming a pedestal with an integral resistance heater. The process may comprise applying a metal layer in a pattern on a beryllium oxide ceramic body, wherein the pattern of the metal layer is connected to a conductor, contacting a first surface of a substrate with the metal layer to position the substrate in line with the ceramic body to form a pre-assembly body, wherein the substrate comprises a ceramic, and heating the pre-assembly body to a joining temperature from 800° C. to 1900° C. to form a heating element that joins the substrate to the ceramic body, wherein the pattern retains integrity when forming the heating element. The metal layer may comprises from 10% to 100% by weight of niobium.
Claims15
A process of forming an integral resistance heater comprising:
- applying a metal layer in a pattern on a surface of a beryllium oxide ceramic body, wherein the pattern of the metal layer is connected to a conductor, wherein the metal layer comprises from 10% to 100% by weight of niobium;
- contacting a first surface of a substrate with the metal layer to position the substrate in line with the beryllium oxide ceramic body to form a pre-assembly body, wherein the substrate comprises a ceramic;
- and
- heating the pre-assembly body to a joining temperature from 800° C. to 1900° C. to form a heating element that joins the substrate to the beryllium oxide ceramic body, wherein the pattern retains integrity when forming the heating element.
Dependencies are inferred from the claim text.