Multilayer piezoelectric substrate device with negative temperature coefficient of frequency dielectric film for temperature stability
AssigneeSkyworks Solutions, Inc.
InventorsRei Goto, Hironori Fukuhara
Life of this patent
Estimating the term…
Loading patent…
AssigneeSkyworks Solutions, Inc.
InventorsRei Goto, Hironori Fukuhara
Estimating the term…
An acoustic wave filter includes a substrate and a piezoelectric layer over the substrate. First acoustic wave resonators are disposed over the piezoelectric layer and arranged in series along a first branch, and second acoustic wave resonators are disposed over the piezoelectric layer, arranged in parallel, and connected to the first branch and to ground. The first and second acoustic wave resonators include an interdigital transducer electrode interposed between a pair of reflectors. A layer of negative temperature coefficient of frequency dielectric material is disposed over one or more of the second plurality of acoustic wave resonators to control the temperature coefficient of frequency and improve temperature stability of the acoustic wave filter.
An acoustic wave filter comprising:
A radio frequency module comprising:
A wireless communication device comprising:
Dependencies are inferred from the claim text.