Stacked acoustic wave device assembly
AssigneeSkyworks Solutions, Inc.
InventorsHironori Fukuhara, Rei Goto
Life of this patent
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AssigneeSkyworks Solutions, Inc.
InventorsHironori Fukuhara, Rei Goto
Estimating the term…
A stacked acoustic wave device assembly is disclosed. The stacked acoustic wave device assembly can include a first acoustic wave device that includes a first substrate, a first piezoelectric layer, a first solid acoustic mirror that is disposed between the first substrate and the first piezoelectric layer, and a first interdigital transducer electrode that is in contact with the first piezoelectric layer. The stacked acoustic wave device assembly can include a second acoustic wave device that includes a second substrate, a second piezoelectric layer, a second solid acoustic mirror that is disposed between the second substrate and the second piezoelectric layer, and a second interdigital transducer electrode that is in contact with the second piezoelectric layer. The second acoustic wave device is stacked over the first acoustic wave device. The first acoustic wave device and the second acoustic wave device are spaced by a spacer assembly such that a cavity is formed between the first acoustic wave device and the second acoustic wave device.
A stacked acoustic wave device assembly comprising:
A radio frequency module comprising:
A wireless communication device comprising:
Dependencies are inferred from the claim text.