Acoustic wave device with multilayer piezoelectric substrate for reduced spurious signals
AssigneeSkyworks Solutions, Inc.
InventorsYuya Hiramatsu, Takuya Ushiyama, Rei Goto
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Abstract
An acoustic wave resonator is disclosed. The acoustic wave resonator can include a plurality of interdigital transducer electrodes and a multilayer piezoelectric substrate (MPS) adjacent the plurality of interdigital transducer electrodes. The MPS includes a first substrate layer of a piezoelectric material, and a second substrate layer of silicon that is bonded to the first layer. The silicon has a cut direction and/or acoustic wave propagation direction that is different from those of a silicon substrate. The silicon substrate has a cut direction and a propagation direction property defined by the silicon cut angle and the propagation direction.
Claims20
An acoustic wave resonator comprising:
- a plurality of interdigital transducer electrodes;
- and
- a multilayer piezoelectric substrate adjacent the plurality of interdigital transducer electrodes, the multilayer piezoelectric substrate including a first substrate layer of a piezoelectric material and a second substrate layer of silicon bonded to the first substrate layer using a titanium metal layer as an adhesive layer.
An acoustic wave resonator comprising a multilayer piezoelectric substrate adjacent a plurality of interdigital transducer electrodes, the multilayer piezoelectric substrate including a first substrate layer of a piezoelectric material, and the multilayer piezoelectric substrate further including a second substrate layer of silicon bonded to the first substrate layer using a titanium metal layer as an adhesive layer, the second substrate layer having a wafer cut angle and a propagation direction of an acoustic wave defined by a Euler angle of (90, 90, 45).
Dependencies are inferred from the claim text.