Acoustic wave device with tilted interdigital transducer electrode
AssigneeSkyworks Solutions, Inc.
InventorsYuya Hiramatsu, Gong Bin Tang
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Abstract
Acoustic wave device is disclosed. the acoustic wave device can include a piezoelectric layer and an interdigital transducer electrode over the piezoelectric layer. The interdigital transducer electrode has a non-zero tilt angle. The non-zero tilt angle can between 5° to 15°. A thickness of the interdigital transducer electrode is at least 40% of a thickness of the piezoelectric layer, 400nm, or 0.08λ where λ is the wavelength generated by the acoustic wave device.
Claims20
An acoustic wave device configured to generate an acoustic wave having a wavelength λ, the acoustic wave device comprising:
- a piezoelectric layer;
- and
- an interdigital transducer electrode over the piezoelectric layer, the interdigital transducer electrode having a non-zero tilt angle, and a thickness of the interdigital transducer electrode being at least 0.08λ.
An acoustic wave device comprising:
- a support substrate;
- a piezoelectric layer over the support substrate;
- and
- an interdigital transducer electrode over the piezoelectric layer, the interdigital transducer electrode having a non-zero tilt angle, and the interdigital transducer electrode having a mass sufficient to suppress a slanted stopband.
An acoustic wave filter comprising:
- an acoustic wave resonator configured to generate an acoustic wave having a wavelength λ, the acoustic wave resonator including piezoelectric layer and an interdigital transducer electrode over the piezoelectric layer, the interdigital transducer electrode having a non-zero tilt angle, and a thickness of the interdigital transducer electrode being at least 0.08λ;
- and
- additional acoustic wave resonators, the acoustic wave resonator and the additional acoustic wave resonators configured to filter a radio frequency signal.
Dependencies are inferred from the claim text.