Uv light irradiation apparatus and mounting system
AssigneeShibaura Mechatronics Corporation
InventorsNaoki SETO, Takuya OHE, Kyota KUROIWA
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Abstract
According to an embodiment, a UV light irradiation apparatus is an apparatus for irradiating UV light onto a resin film with multiple electronic components adhered to a first surface of the resin film. The UV light irradiation apparatus includes a support stage for supporting the resin film; a gas supply portion for supplying inert gas from a gas discharge portion facing the support stage to the first surface of the resin film; and a light source portion irradiating UV light onto a second surface of the resin film opposite the first surface.
Claims13
A UV light irradiation apparatus for irradiating UV light onto a resin film with multiple electronic components adhered to a first surface of the resin film, the UV light irradiation apparatus comprising:
- a support stage for supporting the resin film;
- a gas supply portion for supplying inert gas from a gas discharge portion facing the support stage to the first surface of the resin film;
- and
- a light source portion irradiating UV light onto a second surface of the resin film opposite the first surface.
Dependencies are inferred from the claim text.