Plasma measurement method and plasma measurement system
AssigneeTokyo Electron Limited
InventorEiki KAMATA
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Abstract
There is provided a plasma measurement method of measuring a state of plasma using a plasma measurement system. The plasma measurement system includes a probe device provided in a plasma processing apparatus and a measurement circuit including a signal generator configured to output an alternating-current voltage. The plasma measurement method includes acquiring, by the measurement circuit via the probe device, data including at least fundamental harmonic data and second harmonic data during plasma processing of a prescribed unit, and deriving a plasma state parameter and a parameter of the measurement circuit based on the acquired data.
Claims6
A plasma measurement method of measuring a state of plasma using a plasma measurement system,
- wherein the plasma measurement system comprises:
- a probe device provided in a plasma processing apparatus;
- and
- a measurement circuit including a signal generator configured to output an alternating-current voltage,
- the plasma measurement method comprising:
- acquiring, by the measurement circuit via the probe device, data including at least fundamental harmonic data and second harmonic data during plasma processing of a prescribed unit;
- and
- deriving a plasma state parameter and a parameter of the measurement circuit based on the acquired data.
A plasma measurement system for measuring a state of plasma, comprising:
- a probe device provided in a plasma processing apparatus;
- a measurement circuit including a signal generator configured to output an alternating-current voltage;
- and
- a controller,
- wherein the controller is configured to be capable of executing:
- acquiring, by the measurement circuit via the probe device, data including at least fundamental harmonic data and second harmonic data during plasma processing of a prescribed unit;
- and
- deriving a plasma state parameter and a parameter of the measurement circuit based on the acquired data.
Dependencies are inferred from the claim text.