Jig for plasma processing apparatus and system for operating plasma processing apparatus
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsMing Che CHEN, Wei-Chen LIAO
Life of this patent
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Abstract
A jig for a plasma processing apparatus including one or more first holes in a first part of the jig. The one or more first holes are configured for attachment of the jig to a chamber of the plasma processing apparatus. A second hole in a second part of the jig. A threaded member in the second hole. The threaded member contacts a resonator housing of the plasma processing apparatus. The threaded member is configured to indicate a shift in position of between the resonator housing and the chamber.
Claims20
A jig for a plasma processing apparatus, the jig comprising:
- a body;
- one or more first holes in a first part of the body, wherein the one or more first holes are configured for attachment of the jig to a chamber of the plasma processing apparatus;
- a second hole in a second part of the body;
- a threaded screw in the second hole, wherein the threaded screw is configured to contact a resonator housing of the plasma processing apparatus;
- and
- a collar on the threaded screw, wherein the collar is configured to mark a position of the resonator housing relative to the chamber.
A jig for a plasma processing apparatus, the jig comprising:
- one or more first holes in a first part of the jig, wherein the one or more first holes are configured for attachment of the jig to a chamber of the plasma processing apparatus;
- a second hole in a second part of the jig;
- and
- a threaded member in the second hole, wherein the threaded member contacts a resonator housing of the plasma processing apparatus, and the threaded member is configured to indicate a shift in position of between the resonator housing and the chamber.
A system for operating a plasma processing apparatus, comprising:
- a plasma processing chamber;
- a resonator housing on the plasma processing chamber;
- a jig connected to the plasma processing chamber and configured to record a position of the resonator housing;
- an actuator connected to the jig and configured to adjust spacing between the jig and the resonator housing;
- and
- a controller programmed to determine a position of the resonator housing from an initial position and control the actuator to adjust the spacing between the jig and the resonator housing.
Dependencies are inferred from the claim text.