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US 2026/0279745 A1Published application
Cleancoat and related methods for substrate processing chambers
AssigneeApplied Materials, Inc.
InventorsHe LI, Yao XU, Zhen LIU, Tsung-Han YANG, Xi CEN, Kai WU, Rongjun WANG
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Abstract
An embodiment of a method includes (a) cleaning one or more interior surfaces of a substrate processing chamber. In addition, the method includes (b) depositing a coating on the one or more interior surfaces by use of a plasma-enhanced vapor deposition (PECVD) process after (a) to reduce peeling of residue that is subsequently deposited on the coating.
Claims20
A method comprising:
- (a) cleaning one or more interior surfaces of a substrate processing chamber;
- and
- (b) depositing a coating on the one or more interior surfaces by use of a plasma-enhanced vapor deposition (PECVD) process after (a) to reduce peeling of residue that is subsequently deposited on the coating.
A method comprising:
- (a) performing a deposition process in a processing chamber in which a material is deposited onto a surface of a substrate and additional material is deposited on one or more interior surfaces of the processing chamber as residue;
- (b) removing the substrate from the processing chamber after (a);
- (c) cleaning the residue off of the one or more interior surfaces by use of a radical after(b);
- and
- (d) depositing a coating on the one or more interior surfaces by use of a plasma-enhanced vapor deposition (PECVD) process after (c).
2 more elements
A method comprising:
- (a) depositing a first molybdenum (Mo) coating on one or more interior surfaces of a processing chamber by use of a first plasma-enhanced vapor deposition (PECVD) process;
- (b) performing one or more deposition processes in the processing chamber in which a material is deposited onto a surface of a substrate and additional material is deposited on the first Mo coating as a residue;
- (c) removing the residue and the first Mo coating from the one or more interior surfaces of the processing chamber by use of a radical after (b);
- and
- (d) depositing a second Mo coating on the one or more interior surfaces after (c), by use of a second PECVD process.
2 more elements
Dependencies are inferred from the claim text.