Substrate transfer system and transfer module
AssigneeTokyo Electron Limited
InventorsToshiaki TOYOMAKI, Norihiko AMIKURA, Seiichi KAISE, Masatomo KITA
Life of this patent
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Abstract
This substrate transfer system is provided with: a load-lock module; an atmospheric transfer module having a first sidewall, a second sidewall and a third sidewall, the first sidewall extending along a first direction and connected to the load-lock module, the second sidewall extending along a second direction perpendicular to the first direction, the third sidewall being disposed on an opposite side of the second sidewall; a first load port extending outward from the second sidewall along the first direction; and a second load port extending outward from the third sidewall along the first direction.
Claims17
A substrate transfer system comprising:
- a load-lock module;
- an atmospheric transfer module having a first sidewall, a second sidewall and a third sidewall, the first sidewall extending along a first direction and connected to the load-lock module, the second sidewall extending along a second direction perpendicular to the first direction, the third sidewall being disposed on an opposite side of the second sidewall;
- a first load port extending outward from the second sidewall along the first direction;
- and
- a second load port extending outward from the third sidewall along the first direction.
A transfer module comprising:
- a housing;
- and
- a transfer device disposed in the housing,
- wherein the housing includes:
- a first sidewall having a first opening communicating with a load-lock module;
- and
- a second sidewall, which is different from a sidewall opposite to the first sidewall, connected to a load port and having at least one second opening.
A transfer module comprising:
- a housing;
- and
- a transfer device disposed in the housing,
- wherein the housing includes:
- a first sidewall having a first opening communicating with a load-lock module;
- and
- a second sidewall, which is disposed along a plane including the first sidewall, connected to a load port and having at least one second opening.
Dependencies are inferred from the claim text.