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US 2026/0279741 A1Published application
Encapsulated metal pedestal
AssigneeLam Research Corporation
InventorsTimothy Scott THOMAS, Ramesh CHANDRASEKHARAN
Life of this patent
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Abstract
A pedestal for a substrate processing system includes a base portion and a stem portion. The base portion includes a first metallic material. The stem portion is coupled to the base portion. A second metallic material encapsulates the base portion. The second metallic material is different than the first metallic material.
Claims26
A pedestal for a substrate processing system, the pedestal comprising:
- a base portion comprising a first metallic material;
- a stem portion coupled to the base portion;
- and
- a second metallic material encapsulating the base portion, the second metallic material being different than the first metallic material.
1 more element
Dependencies are inferred from the claim text.