Methods and systems for cooling plasma treatment components
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsCheng Kuang Tso, Chou-Feng Lee, Chih-Hsien Hsu, Chung-Hsiu Cheng, Jr-Sheng Chen
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Abstract
Methods and systems for uniformly cooling a dome within a plasma treatment system are disclosed. The methods and systems utilize a diffuser including a perforated plate and a cone. The perforated plate includes a center portion and multiple arrays of holes with each array being located circumferentially at a different distance from the center. The cone extends away from the center. The diffuser spreads cooling gas more uniformly across the surface of the dome.
Claims20
A method for uniformly cooling a dome used in a plasma treatment process, the method comprising:
- providing a gas through a diffuser towards a surface of the dome;
- wherein the diffuser comprises:
- a perforated plate comprising a central portion and a plurality of arrays of holes, each array of the plurality of arrays being located circumferentially at a different distance from the central portion;
- and
- a cone extending from the central portion and away from the dome.
A plasma etching method, comprising:
- plasma etching a substrate beneath a dome in a system comprising:
- a plasma etching chamber comprising the dome, the dome comprising an inner surface partially defining the plasma etching chamber;
- a cooling chamber comprising a gas inlet and partially defined by an outer surface of the dome;
- and
- a diffuser within the cooling chamber and in fluid communication with the gas inlet, the diffuser comprising:
- a perforated plate comprising a central portion and a plurality of arrays of holes, each array being located circumferentially at a different distance from the central portion;
- and
- a cone extending from the central portion and away from the dome;
- and
- flowing a cooling gas through the diffuser towards the outer surface of the dome to more uniformly cool the dome.
A diffuser for a cooling chamber of a plasma etching system, comprising:
- a perforated plate comprising a central portion and a plurality of arrays of holes, each array being located circumferentially at a different distance from the central portion;
- and
- a cone extending from the central portion and away from the dome.
Dependencies are inferred from the claim text.