Aberration correction reflector apparatus, aberration correction system, and method thereof

Abstract

An aberration correction reflector apparatus including a reflector, and a transmission electrode group coaxially spaced from one side of the reflector, the transmission electrode group including four or more transmission electrodes coaxially spaced apart. The reflector includes a reflector body, a first through hole for electrons to pass through is arranged at a center of the reflector body and passes through upper and lower surfaces of the reflector body, the reflector further includes a cover disposed on a side of the first through hole away from the transmission electrode group, the cover protrudes toward a direction away from the transmission electrode group. Each transmission electrode includes a transmission electrode body, and a second through hole for electrons to pass through is arranged at a center of the transmission electrode body and passes through upper and lower surfaces of the transmission electrode body.

Dependencies are inferred from the claim text.