Charged particle beam device and method

Abstract

A charged particle beam device having an optical axis and comprising: a charged particle source for providing a primary charged particle beam; a deflector arrangement configured to provide a tilted primary charged particle beam and to guide signal charged particles comprising: a first deflector, a second deflector positioned downstream of the first deflector, a third deflector positioned downstream of the second deflector, a fourth deflector positioned downstream of the third deflector; a first detector comprising a first detection area for detecting signal charged particles and positioned upstream of the second deflector; an objective lens for focusing the primary charged particle beam onto a sample to generate the signal charged particles.

Dependencies are inferred from the claim text.