Monitoring system of clean room
AssigneeTokyo Electron Limited
InventorsHikaru AKADA, Takayuki OGAMI
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Abstract
A monitoring system may include: a detection tape disposed on upper surfaces of some or all of floor tiles surrounding the substrate processing apparatus, the detection tape extending across a plurality of floor tiles and comprising a conductive layer disposed along a longitudinal direction of the tape; and a controller configured to generate an alarm based on electrical continuity in the conductive layer.
Claims20
A monitoring system for monitoring surroundings of a substrate processing apparatus installed in a cleanroom, the monitoring system comprising:
- a detection tape disposed on upper surfaces of some or all of floor tiles surrounding the substrate processing apparatus, the detection tape extending across a plurality of floor tiles,
- wherein the detection tape comprises a conductive layer disposed along a longitudinal direction of the tape, and
- wherein the monitoring system further comprises a controller configured to generate an alarm based on electrical continuity in the conductive layer.
A monitoring apparatus for monitoring surroundings of a substrate processing apparatus installed in a cleanroom, the monitoring apparatus comprising a controller configured to be connected to a detection tape disposed on upper surfaces of some or all of floor tiles surrounding the substrate processing apparatus, the detection tape extending across a plurality of floor tiles and comprising a conductive layer disposed along a longitudinal direction thereof,
- wherein the controller is configured to generate an alarm based on electrical continuity in the conductive layer.
A detection tape used in a monitoring system for monitoring surroundings of a substrate processing apparatus installed in a cleanroom,
- wherein the monitoring system includes a controller configured to generate an alarm based on electrical continuity in a conductive layer of the detection tape,
- wherein the detection tape is disposed on upper surfaces of some or all of floor tiles surrounding the substrate processing apparatus and extends across a plurality of floor tiles,
- wherein the detection tape comprises:
- an insulating base portion comprising insulating adhesive layers on a front surface and a back surface;
- the conductive layer provided on the front surface of the base portion and disposed along a longitudinal direction of the detection tape;
- an insulating non-adhesive region disposed on the front surface of the base portion along the longitudinal direction of the detection tape;
- and
- an insulating protective layer covering the conductive layer and the non-adhesive region and adhering to the base portion, and
- wherein the detection tape is configured to be paid out from a roll-wound state.
Dependencies are inferred from the claim text.