Inspection system, inspection method, and storage medium

An inspection system for inspecting a substrate processing apparatus including a holder configured to hold a substrate, and a peripheral processor, which has a facing surface facing a peripheral portion of a front surface of the substrate held by the holder and performs a process on the peripheral portion, the inspection system comprising:

• an inspection substrate including a support plate held by the holder in place of the substrate, and a capturer provided on the support plate to capture images of surroundings of the support plate;
• a storage configured to store a positional relationship between the facing surface and an imaging target provided on the peripheral processor such that the imaging target falls within a field of view of the capturer;
• an acquirer configured to acquire an image including the imaging target from the capturer;
• and
• a position detector configured to detect a position of the facing surface based on a position of the imaging target in the image and the positional relationship.