Methods and apparatus for modulating light

A light modulation array, comprising:

• a substrate;
• a plurality of light modulation elements over the substrate;
• and
• an isolation structure between two adjacent light modulation elements of the plurality of light modulation elements,
• wherein:
• an individual light modulation element of the plurality of light modulation elements includes a stack, the stack comprising:
• a heater element over the substrate,
• a first dielectric material over the heater element,
• a mirror layer over the first dielectric material,
• a second dielectric material over the mirror layer, and
• a phase change material over the second dielectric material, wherein the phase change material is to change a phase based on a thermal contribution from the heater element,
• the individual light modulation element of the plurality of light modulation elements further includes a third dielectric material,
• the third dielectric material encapsulates the stack at least over a sidewall and a top surface of the stack,
• a thermal conductivity of the third dielectric material is lower than a thermal conductivity of the first dielectric material and a thermal conductivity of the second dielectric material, and
• the individual light modulation element of the plurality of light modulation elements further includes a first electrically conductive interconnect and a second electrically conductive interconnect connected to a bottom surface of the heater element.

A light modulation array, comprising:

• a substrate;
• a plurality of light modulation elements over the substrate;
• and
• an isolation structure between two adjacent light modulation elements of the plurality of light modulation elements,
• wherein:
• an individual light modulation element of the plurality of light modulation elements includes a mirror over the substrate and a stack over the mirror, the stack comprising:
• a heater element, and
• a phase change material over the heater element, wherein the phase change material is to change a phase based on a thermal contribution from the heater element,
• the individual light modulation element of the plurality of light modulation elements further includes:
• a first dielectric material encapsulating the mirror, and
• a second dielectric material separating the heater element from the phase change material.

A light modulation array, comprising:

• a substrate;
• a plurality of light modulation elements over the substrate, wherein an individual light modulation element of the plurality of light modulation elements includes a stack, the stack comprising:
• a heater element above the substrate,
• a first dielectric material above the heater element,
• a reflective layer above the first dielectric material,
• a second dielectric material above the reflective layer, and
• a phase change material over the second dielectric material, wherein the phase change material is to change a phase based on a thermal contribution from the heater element, and wherein:
• the individual light modulation element of the plurality of light modulation elements further includes a third dielectric material,
• the third dielectric material encapsulates the stack, and
• a thermal conductivity of the third dielectric material is lower than a thermal conductivity of the first dielectric material and a thermal conductivity of the second dielectric material.