Magnetic detection system

Abstract

To provide a magnetic detection system capable of detecting a metallic foreign object with high sensitivity. A magnetic detection system includes: a signal generation circuit that generates an excitation signal; an excitation coil to which the excitation signal is supplied; a buffer circuit that is connected between the signal generation circuit and the excitation coil; magnetic sensors that are disposed on opposite sides of the excitation coil along the coil axis direction; a sample stage that holds a sample between the excitation coil and the first magnetic sensor; and a detection circuit that generates a detection signal based on the difference between output signals from the magnetic sensors. With this configuration, the buffer circuit suppresses waveform distortion of the excitation signal, thereby enabling detection of a metallic foreign object with high sensitivity.

Dependencies are inferred from the claim text.