Probe card and method for manufacturing probe card
AssigneeKabushiki Kaisha Nihon Micronics
InventorsToshinori OMORI, Yuto NARA, Masatoshi YOKOUCHI, Tatsuya ITO
Life of this patent
Estimating the term…
Abstract
A probe card includes a main board, a wiring board having a plurality of probes, a plurality of pogo pins electrically connecting the main board and the wiring board, and a pin holder disposed between the main board and the wiring board and having a plurality of guide holes which guide the plurality of pogo pins, in which the pin holder is formed from a ceramic holder having therein a plurality of conductor layers which are not electrically connected to each other.
Claims7
A probe card comprising:
- a main board;
- a wiring board having a plurality of probes;
- a plurality of pogo pins electrically connecting the main board and the wiring board;
- and
- a pin holder disposed between the main board and the wiring board and having a plurality of guide holes which guide the plurality of pogo pins, wherein
- the pin holder is formed from a ceramic holder having therein a plurality of conductor layers which are not electrically connected to each other.
A method for manufacturing a probe card, which is a method for manufacturing a probe card including:
- a main board;
- a wiring board having a plurality of probes;
- a plurality of pogo pins electrically connecting the main board and the wiring board;
- and
- a pin holder disposed between the main board and the wiring board and having a plurality of guide holes which guide the plurality of pogo pins, the method comprising:
- forming the pin holder from a ceramic holder having therein a plurality of conductor layers which are not electrically connected to each other.
Dependencies are inferred from the claim text.