Probe module and microprobe system comprising same

Abstract

A probe module includes: a base; a guide rail which is provided on the base; a guide member which slides along the guide rail; a rotating member which is connected to the guide member to be rotatable with respect to the guide member about a first axis parallel to the height direction; a probe assembly which is connected to the rotating member to be rotatable with respect to the rotating member about a second axis perpendicular to the first axis in a first horizontal rotation direction approaching toward a specimen and a second horizontal rotation direction away from the specimen, and includes a probe; and an elastic member which provides torque to the probe assembly in the first horizontal rotation direction.

Dependencies are inferred from the claim text.