System and method for calibration of inspection tools
AssigneeASML Netherlands B.V.
InventorYongxin WANG
Life of this patent
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Abstract
Systems, apparatuses, and methods for calibration of inspection tools. Systems, apparatuses, and methods may include, after a replaceable reference sample is affixed to a stage of an imaging system: calibrating a parameter of the imaging system based on a scan of the reference sample by the imaging system; and after calibrating the parameter of the imaging system, scanning a sample, wherein the sample comprises a duplicate of a feature of the reference sample.
Claims35
A system comprising:
- a controller including circuitry configured to cause the system to perform, after a replaceable reference sample is affixed to a stage of an imaging system:
- calibrating a parameter of the imaging system based on a scan of the reference sample by the imaging system;
- and
- after calibrating the parameter of the imaging system, scanning a sample, wherein the sample comprises a duplicate of a feature of the reference sample.
A system comprising:
- a controller including circuitry configured to cause the system to perform, after a replaceable reference sample is affixed to a stage of an imaging system:
- calibrating a parameter of the imaging system based on a scan of the reference sample by the imaging system;
- and
- after calibrating the parameter of the imaging system, scanning a sample, wherein the sample comprises a duplicate of a feature of the reference sample.
A non-transitory computer readable medium that stores a set of instructions that is executable by at least one processor of a computing device to cause the computing device to perform a method for calibration, the method comprising:
- after a replaceable product die is affixed to a stage of an imaging system:
- calibrating a characteristic of the imaging system based on a scan of the product die by the imaging system;
- and
- after calibrating the characteristic of the imaging system, scanning a wafer,
- wherein the wafer comprises a copy of a feature of the product die.
A non-transitory computer readable medium that stores a set of instructions that is executable by at least one processor of a computing device to cause the computing device to perform operations for calibration, the operations comprising:
- after a replaceable product die is affixed to a stage of an imaging system:
- calibrating a characteristic of the imaging system based on a scan of the product die by the imaging system;
- and
- after calibrating the characteristic of the imaging system, scanning a wafer,
- wherein the wafer comprises a copy of a feature of the product die.
A method of calibration comprising:
- after a replaceable product die is affixed to a stage of an imaging system:
- calibrating a characteristic of the imaging system based on a scan of the product die by the imaging system;
- and
- after calibrating the characteristic of the imaging system, scanning a wafer, wherein the wafer comprises a copy of a feature of the product die.
Dependencies are inferred from the claim text.