Inspection device
AssigneeKware Systems Co., Ltd.
InventorKazuhiko KIMURA
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Abstract
An inspection device includes: a surface defect detection system including an illumination device including an illumination laser light source device and a reflection observation device including a reflection sensor; and a photoluminescence detection system including a UV irradiation device including an excitation laser light source device and a fluorescence observation device including a fluorescence sensor, in which measurement light is acquired by the reflection observation device and fluorescence is acquired by the fluorescence observation device while irradiating an object with illumination light by the illumination laser light source device and irradiating the object with excitation light by the excitation laser light source device.
Claims8
An inspection device comprising:
- a surface defect detection system including an illumination device including an illumination laser light source device and a reflection observation device including a reflection sensor;
- and
- a photoluminescence detection system including a UV irradiation device including an excitation laser light source device and a fluorescence observation device including a fluorescence sensor, wherein
- measurement light is acquired by the reflection observation device and fluorescence is acquired by the fluorescence observation device while irradiating an object with illumination light by the illumination laser light source device and irradiating the object with excitation light by the excitation laser light source device.
Dependencies are inferred from the claim text.