Polymer monitoring device and method using terahertz waves
AssigneeIucf-Hyu (Industry-University Cooperation Foundation Hanyang
InventorsHak Sung KIM, Sang ll KIM
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Abstract
A polymer monitoring device using terahertz waves is provided. The polymer monitoring device using terahertz waves may comprise: an emitter which emits terahertz waves toward a polymer thin film coated on a target substrate; a detector which detects terahertz waves emitted from the emitter and reflected from a surface of the target substrate or terahertz waves penetrating the polymer thin film and the target substrate; and a monitoring unit which, during curing of the polymer thin film, acquires thickness and refractive index information of the polymer thin film in real time through the terahertz waves detected by the detector.
Claims14
A polymer monitoring device using terahertz waves, the polymer monitoring device comprising:
- an emitter for generating terahertz waves toward a polymer thin film coated on a target substrate;
- a detector for detecting terahertz waves generated from the emitter and reflected from a surface of the target substrate, or terahertz waves transmitted through the polymer thin film and the target substrate;
- and
- a monitoring unit for acquiring thickness and refractive index information of the polymer thin film in real time through the terahertz waves detected by the detector during curing of the polymer thin film.
A polymer monitoring method using terahertz waves, the polymer monitoring method comprising:
- generating terahertz waves toward a polymer thin film coated on a target substrate;
- detecting terahertz waves reflected from a surface of the target substrate, or terahertz waves transmitted through the polymer thin film and the target substrate;
- and
- acquiring thickness and refractive index information of the polymer thin film in real time through the terahertz waves detected in the detecting of the terahertz waves during curing of the polymer thin film.
Dependencies are inferred from the claim text.