Detecting device and method for inspecting the seal-tightness of sealed products
AssigneePfeiffer Vacuum GmbH
InventorsJulien PALISSON, Philippe BUNOD
Life of this patent
Estimating the term…
Loading patent…
AssigneePfeiffer Vacuum GmbH
InventorsJulien PALISSON, Philippe BUNOD
Estimating the term…
A detecting device for inspecting the seal-tightness of sealed products includes an enclosure to receive at least one product that has been sealed under a nitrogen-containing atmosphere, a turbomolecular vacuum pump, an ionized gas gauge, a buffer volume fluidically connected to a chamber of the ionized gas gauge, an isolation valve interposed between the enclosure and the buffer volume and able to put in communication or isolate the buffer volume with/from the enclosure, a variable conductance restriction interposed between the inlet of the turbomolecular vacuum pump and the buffer volume having a variable aperture, and a gas-injecting device to inject a variable flow rate of substitution gas other than nitrogen into the enclosure containing the sealed product
1-13. (canceled)
A detection device for checking a leaktightness of sealed products, comprising:
Dependencies are inferred from the claim text.