Method, device, and application thereof for measuring gas inside a foup
AssigneeAsia Neo Tech Industrial Co., Ltd.
InventorPU-CHANG YEH
Life of this patent
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Abstract
The present invention provides a method, device, and application thereof for measuring gas inside a FOUP. The method comprises: constructing a closed gas loop via at least two valve ports connected to a compartment space of the FOUP; driving the gas to generate an internal circulation flow between the gas loop and the compartment space; and measuring the content of a judgment factor in the circulating gas to evaluate the air-tightness of the compartment space. The invention also provides a measuring device for gas in the FOUP, and the measuring method and device can also be used for detecting the humidity in the compartment space.
Claims20
A method for measuring gas inside a FOUP, used for measuring the gas within a compartment space of the FOUP, wherein the compartment space is formed within a shell and sealed by a door closing the shell, and the shell comprises at least two valve ports to control the time of gas communication between the compartment space and the external environment, the method comprises:
- constructing a closed gas loop, which connects to the compartment space via the at least two valve ports;
- driving the gas to generate internal circulation flow between the compartment space and the gas loop;
- and measuring the content of a judgment factor in the circulating gas to detect the air-tightness of the compartment space and the gas concentration.
A device for measuring gas inside a FOUP, used for measuring the gas within a compartment space of the FOUP, wherein, the compartment space is formed within a shell and sealed by a door closing the shell, and the shell comprises at least two valve ports to control the time of gas communication between the compartment space and the external environment, the device comprises:
- a gas delivery pipe, connected between the at least two valve ports and communicating with the compartment space, said gas delivery pipe being used to guide gas into the compartment space and form a closed gas loop;
- a gas driver, serially connected to the gas delivery pipe, and used to drive the gas to generate internal circulating flow between the compartment space and the gas delivery pipe;
- and
- a detecting element, serially connected to the gas delivery pipe, and positioned between the gas driver and one of the at least two valve ports, used to measure the content of a judgment factor in the circulating gas.
Dependencies are inferred from the claim text.