Sensors for measuring pressure and temperature
AssigneeSimmonds Precision Products, Inc.
InventorsKristen Brosnan, Peter J. Carini
Life of this patent
Estimating the term…
Abstract
A Fabry-Pérot sensor assembly includes an optical element having a first end opposite a second end relative to a longitudinal axis of the Fabry-Perot sensor assembly. A first optical member is provided at the first end. A second optical member provided at the second end is a diaphragm that deflects more than the first optical member in response to pressure changes external to the optical element. An optical cavity is provided between the first end and the second end. A ring-shaped mirror is attached to a surface of the first optical member facing the second optical member. The ring-shaped mirror does not interfere with light propagation at an end of a bore that interfaces with the first optical member and configured to contain an optical fiber.
Claims20
A Fabry-Pérot sensor assembly comprising:
- an optical element comprising:
- a first end opposite a second end relative to a longitudinal axis of the Fabry-Perot sensor assembly;
- a first optical member at the first end;
- a second optical member at the second end comprising a diaphragm that deflects more than the first optical member in response to pressure changes external to the optical element;
- an optical cavity between the first end and the second end;
- and
- a ring-shaped mirror attached to a surface of the first optical member facing the second optical member, wherein the ring-shaped mirror does not interfere with light propagation at an end of a bore that interfaces with the first optical member and configured to contain an optical fiber.
A method of making a Fabry-Perot optical element comprising:
- forming a first optical member;
- forming a second optical member comprising a diaphragm and cooperating with the first optical member to form an optical cavity;
- and
- connecting a ring-shaped minor to a surface of the first optical member facing the second optical member such that the ring-shaped mirror does not interfere with light propagation at an end of a bore that interfaces with the first optical member and configured to contain an optical fiber.
Dependencies are inferred from the claim text.