Apparatus and methods for obtaining accurate fluid flow rates
AssigneeGlobal Life Sciences Solutions USA LLC
InventorsJeffrey SOCHA, Prasad BAGIYANATHAN, Nicholas BROCATO
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Abstract
A method for obtaining an accurate gas flow rate for a thermal mass flow controller located within an enclosure is provided. The method includes obtaining a measurement of at least one gas within the enclosure, the gas having a thermal conductivity greater or less than a thermal conductivity of air and mitigating effects of the at least one gas on the thermal mass flow controller resulting from the gas's thermal conductivity
Claims21
A method for obtaining an accurate gas flow rate for a thermal mass flow controller located within an enclosure comprising the steps of:
- obtaining a measurement of at least one gas within the enclosure, the gas having a thermal conductivity greater or less than a thermal conductivity of air;
- and
- mitigating effects of the at least one gas on the thermal mass flow controller resulting from the gas's thermal conductivity.
An apparatus for housing gas flow control equipment, the apparatus comprising:
- a selectively closeable enclosure having an interior volume configured to receive gas flow control equipment including a plurality of thermal mass flow controllers;
- and
- a mitigation device configured to mitigate effects of a gas leaking from the gas flow control equipment into the enclosure on a thermal mass flow controller that result from the gas's thermal conductivity.
Dependencies are inferred from the claim text.