Method for controlling the operating parameters of a turbomolecular vacuum pump

Abstract

A method controls the operating parameters of a turbomolecular vacuum pump including a stator, a rotor, a motor to drive the rotor in rotation in the stator, an internal heating device on the gas flow path of the vacuum pump to heat the rotor, a temperature sensor to measure the temperature of the rotor, and an external heating device to heat the stator. The control method includes a nominal operating mode in which the rotor is heated by the internal heating device as long as the measured temperature of the rotor is below a temperature threshold for a given parameter representative of the power consumed by the motor, and a boost operating mode in which the internal heating of the rotor is cut off when the measured temperature of the rotor is above or equal to the temperature threshold.

Dependencies are inferred from the claim text.