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US 2026/0275984 A1Published application
Vacuum pump
OwnerMichael Henry North, Cainan Long +5inventors
InventorsMichael Henry North, Cainan Long, Matthew Richard Wickes, Sivabalan Kailasam, Wonsik Song, YoungHyun You, YoungMin Kim
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Abstract
A vacuum pump comprising: a stator, the stator comprising one or more stator walls defining a pumping chamber; and a heat transfer device coupled to the one or more stator walls, the heat transfer device comprising: a thermally conductive body; and a conduit through the thermally conductive body and through which, in use, a purge gas is passed whereby to heat the purge gas.
Claims15
A vacuum pump comprising:
- a stator, the stator comprising one or more stator walls defining a pumping chamber;
- and
- a heat transfer device coupled to the one or more stator walls, the heat transfer device comprising:
- a thermally conductive body;
- and
- a conduit through the thermally conductive body and through which, in use, a purge gas is passed whereby to heat the purge gas.
3 more elements
Dependencies are inferred from the claim text.