Fluid control device
AssigneeMurata Manufacturing Co., Ltd.
InventorsMasaaki Fujisaki, Daisuke Kondo
Life of this patent
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Abstract
A fluid control device includes an actuator, and a loop-shaped frame that fixes at least a part of an outer periphery of the actuator. The actuator includes a piezoelectric body having a first main surface and a second main surface, and a vibrating plate connected to the first main surface of the piezoelectric body. The frame is disposed at the second main surface. An outer diameter of the vibrating plate and an outer diameter of the piezoelectric body are greater than an inner diameter of the frame, and the outer diameter of the vibrating plate or an outer diameter of the frame is greater than the outer diameter of the piezoelectric body.
Claims20
A fluid control device, comprising:
- an actuator;
- and
- a loop-shaped frame disposed at the actuator and fixing at least a part of an outer periphery of the actuator,
- wherein the actuator includes
- a piezoelectric body having a first main surface and a second main surface, and
- a vibrating plate connected to the first main surface of the piezoelectric body,
- wherein the frame is disposed at the second main surface,
- wherein each of an outer diameter of the vibrating plate and an outer diameter of the piezoelectric body is greater than an inner diameter of the frame, and
- wherein the outer diameter of the vibrating plate or an outer diameter of the frame is greater than the outer diameter of the piezoelectric body.
A fluid control device, comprising:
- an actuator;
- and
- a loop-shaped frame disposed at the actuator and fixing at least a part of an outer periphery of the actuator,
- wherein the actuator includes
- a piezoelectric body having a first main surface and a second main surface, and
- a vibrating plate connected to the piezoelectric body,
- wherein the vibrating plate includes
- a first vibrating plate connected to the first main surface, and
- a second vibrating plate connected to the second main surface,
- wherein the frame is disposed at a surface of the first vibrating plate or the second vibrating plate opposite a surface at which the piezoelectric body is disposed,
- wherein each of an outer diameter of the first vibrating plate, an outer diameter of the second vibrating plate, and an outer diameter of the piezoelectric body is greater than an inner diameter of the frame, and
- wherein the outer diameter of the first vibrating plate, the outer diameter of the second vibrating plate, or the outer diameter of the frame is greater than the outer diameter of the piezoelectric body.
Dependencies are inferred from the claim text.