Room-temperature-operated high-selectivity no2 sensor device and fabrication method thereof

Abstract

A room-temperature-operated high-selectivity NO2 sensor device and a fabrication method thereof are provided. The room-temperature-operated high-selectivity NO2 sensor device includes an electrode substrate and a black TiO2 sensing film uniformly loaded on a surface of the electrode substrate. The fabrication method includes the following steps: adding TiO2 to a solvent to prepare a slurry; drop-coating the slurry uniformly onto an electrode substrate, and uniformly and slowly heating the electrode substrate to remove the solvent; repeating the drop-coating and heating process a plurality of times to form a TiO2 coating with a desired thickness on a surface of the electrode substrate; and vacuum-annealing the electrode substrate with the TiO2 coating to form a black TiO2 sensing film on the surface of the electrode substrate. The black TiO2 sensing film has oxygen vacancies, enabling NO2 detection at room temperature with high selectivity and humidity resistance.

Dependencies are inferred from the claim text.