Deposition mask, method of manufacturing the same, and electronic device manufactured by using the same
AssigneeSamsung Display Co., Ltd.
InventorsIl Sup KIM, Su Bin BAE
Life of this patent
Estimating the term…
Abstract
A deposition mask, a method of manufacturing the same, and an electronic device manufactured by using the same are provided. The deposition mask includes a mask substrate having a cell opening, and a membrane on the mask substrate and having pixel openings communicating with the cell opening. The cell opening extends through the mask substrate, and the pixel openings extend through the membrane and have a width that gradually decreases in a direction away from the cell opening.
Claims20
A deposition mask comprising:
- a mask substrate having a cell opening;
- and
- a membrane on the mask substrate and having pixel openings communicating with the cell opening,
- wherein the cell opening extends through the mask substrate, and
- the pixel openings extend through the membrane and have a width that gradually decreases in a direction away from the cell opening.
A method of manufacturing a deposition mask, comprising:
- forming a membrane on a mask substrate;
- forming a cell opening extending through the mask substrate;
- and
- forming pixel openings extending through the membrane to communicate with the cell opening,
- wherein the pixel openings have a width that gradually decreases in a direction away from the cell opening.
An electronic device comprising a display panel,
- wherein the display panel comprises a backplane substrate and a plurality of light-emitting layers formed on the backplane substrate by utilizing a deposition mask,
- the deposition mask comprises:
- a mask substrate having a cell opening;
- and
- a membrane on the mask substrate and having pixel openings communicating with the cell opening,
- wherein the cell opening extends through the mask substrate,
- the pixel openings extend through the membrane and have a width that gradually decreases in a direction away from the cell opening, and
- the plurality of light-emitting layers is formed by a deposition process that provides a vapor deposition material through the cell opening and the pixel openings.
Dependencies are inferred from the claim text.