Vapor deposition apparatus and production method for display device

A vapor deposition apparatus comprising:

• a crucible including an opening configured to release a vapor deposition material toward a vapor deposition target;
• and
• a lid portion configured to move between a blocking position, the vapor deposition material being prevented from reaching the vapor deposition target at the position and an opening position, the vapor deposition material reaching the vapor deposition target at the position,
• wherein the lid portion includes
• a top plate portion overlapping the opening when the opening is viewed from a position where the vapor deposition target is disposed when the lid portion is at the blocking position,
• at least one hole communicating through the top plate portion, and
• at least one cap configured to close the hole in an openable and closable manner,
• the lid portion further includes
• an inner lid including the top plate portion, the hole, and the cap, and
• an outer lid configured to detachably attach the inner lid and support the inner lid on a side opposite to the opening with respect to the inner lid in a state in which the lid portion is at the blocking position.

A vapor deposition apparatus comprising:

• a crucible including an opening configured to release a vapor deposition material toward a vapor deposition target;
• and
• a lid portion configured to move between a blocking position, the vapor deposition material being prevented from reaching the vapor deposition target at the position and an opening position, the vapor deposition material reaching the vapor deposition target at the position,
• wherein the lid portion includes
• a top plate portion overlapping the opening when the opening is viewed from a position where the vapor deposition target is disposed when the lid portion is at the blocking position,
• at least one hole communicating through the top plate portion, and
• at least one cap configured to close the hole in an openable and closable manner,
• the lid portion further includes
• a plurality of the holes and
• a plurality of caps each configured to close a respective one of the holes in an openable and closable manner.