Ozone supply system and ozone supply method

An ozone supply method comprising:

• an adsorption step of adsorbing generated ozone to an adsorbent stored in an adsorption column, leading out oxygen not adsorbed to the adsorbent from the adsorption column, introducing the oxygen as source gas into an ozone generator again to regenerate ozone, and supplying the ozone to the adsorption column;
• a first desorption step of, after the adsorption step is finished, introducing first carrier gas into the adsorption column and desorbing the ozone adsorbed to the adsorbent by taking the ozone along with the first carrier gas so as to be led out to the adsorption column;
• and
• a vacuum desorption step of, after introduction of the first carrier gas is stopped, depressurizing inside of the adsorption column until a pressure in the adsorption column becomes lower than an atmospheric pressure.

An ozone supply method comprising:

• an adsorption step of adsorbing generated ozone to an adsorbent stored in an adsorption column, leading out oxygen not adsorbed to the adsorbent from the adsorption column, introducing the oxygen as source gas into an ozone generator again to regenerate ozone, and supplying the ozone to the adsorption column;
• a first desorption step of, after the adsorption step is finished, introducing first carrier gas into the adsorption column and desorbing the ozone adsorbed to the adsorbent by taking the ozone along with the first carrier gas so as to be led out to the adsorption column;
• and
• a second desorption step of, after introduction of the first carrier gas is stopped, introducing second carrier gas having a lower nitrogen concentration than a nitrogen concentration of the first carrier gas, desorbing the ozone adsorbed to the adsorbent, and leading the desorbed ozone to outside of the adsorption column, and also replacing the first carrier gas remaining in the adsorption column with the second carrier gas.