Piezoelectric actuator and liquid ejecting head
AssigneeCanon Kabushiki Kaisha
InventorsSHOGO TAZAWA, REI KURASHIMA, YOUICHI FUKAYA
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AssigneeCanon Kabushiki Kaisha
InventorsSHOGO TAZAWA, REI KURASHIMA, YOUICHI FUKAYA
Estimating the term…
A piezoelectric actuator includes a first insulation layer provided on a surface of a substrate; a conductive layer provided on the first the insulation layer; a second insulation layer provided on the conductive layer; a piezoelectric element provided on a part of the second insulation layer, the piezoelectric element including a first electrode, a piezoelectric body, and a second electrode in this order; a third insulation layer covering at least a part of the second insulation layer; a first contact plug having one end electrically connected to the conductive layer; a second contact plug having one end electrically connected to the first electrode; and a wiring line provided on the third insulation layer, and electrically connecting another end of the first contact plug and another end of the second contact plug.
A piezoelectric actuator comprising:
A piezoelectric actuator comprising:
Dependencies are inferred from the claim text.