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US 2026/0273678 A1Published application
Pedestal heater support structure
AssigneeApplied Materials, Inc.
InventorFrank Wing-Fung CHENG
Life of this patent
Estimating the term…
Abstract
A support plate for a substrate support includes a disc coupled to an underside of the substrate support. The disc is deformed upon installation such that the disc exerts a biasing force on the underside of the substrate support. The biasing force counteracts a tendency of a peripheral portion of the substrate support to sag.
Claims20
A support plate for a substrate support, the support plate comprising:
- a disc;
- an aperture at a center of the disc;
- and
- a plurality of projections extending from an upper surface of the disc.
1 more element
An assembly, comprising:
- a substrate support;
- a shaft coupled to the substrate support;
- and
- a support plate including a disc disposed around the shaft, and coupled to the substrate support, such that the disc exerts a biasing force on an underside of the substrate support.
1 more element
An assembly, comprising:
- a substrate support;
- a shaft coupled to the substrate support;
- and
- a support plate coupled to an underside of the substrate support, the support plate including a disc, the disc including:
- an aperture through which the shaft is disposed;
- and
- a plurality of projections extending from an upper surface of the disc, and in contact with the underside of the substrate support.
4 more elements
Dependencies are inferred from the claim text.