Apparatus for removing expansion bolt for semiconductor processing apparatus
AssigneesTsmc China Company Limited, Taiwan Semiconductor Manufacturing Company, Ltd.
InventorsXudong LIU, Chi SUN, Guangren SHI, Jinsong ZENG
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Abstract
An apparatus includes a support frame and a hydraulic cylinder. The hydraulic cylinder includes a piston rod fixed to the support frame, and a barrel over the piston rod and movably receiving the piston rod. A hydraulic source is in fluid communication with a fluid chamber within the hydraulic cylinder. Furthermore, a bolt lifter includes a top plate above the barrel of the hydraulic cylinder, and a lifting fork below the piston rod of the hydraulic cylinder. The lifting fork is liftable by a linear motion of the barrel relative to the piston rod.
Claims20
An apparatus, comprising:
- a support frame;
- a hydraulic cylinder comprising a piston rod fixed to the support frame, and a barrel over the piston rod and movably receiving the piston rod;
- a hydraulic source in fluid communication with a fluid chamber disposed within the hydraulic cylinder;
- and
- a bolt lifter comprising a top plate above the barrel of the hydraulic cylinder, and a lifting fork below the piston rod of the hydraulic cylinder, wherein the lifting fork is liftable by a linear motion of the barrel relative to the piston rod.
An apparatus, comprising:
- a hydraulic source;
- a hydraulic cylinder pressurizable by the hydraulic source, the hydraulic cylinder comprising a piston rod and a barrel positioned over the piston rod, the barrel being elevatable in response to a hydraulic pressure generated by the hydraulic source;
- and
- a bolt lifter comprising a lifting fork elevatable by the barrel of the hydraulic cylinder, wherein the lifting fork comprises two fingers and a slot separating the fingers, wherein the slot is positioned below the piston rod.
An apparatus, comprising:
- a hydraulic cylinder comprising a piston rod, a barrel movably disposed over the piston rod, and a top rod extending upwards from the barrel;
- and
- a bolt lifter comprising a top plate having an opening, and a lifting fork coupled to the top plate, the lifting fork comprising a slot, wherein the top rod of the hydraulic cylinder is inserted into the opening of the bolt lifter to confine a horizontal movement of the barrel, and the slot comprises a rear portion vertically aligned with the opening in the top plate.
Dependencies are inferred from the claim text.