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US 2026/0273657 A1Published application
Positioning system and laser apparatus including the same
AssigneeSamsung Display Co., Ltd.
InventorsYONGHYUN KIM, SEUNGHO MYOUNG, KYU-BUM KIM, JAEHAN KIM, GYEONGHEE HAN
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Abstract
A positioning system includes a stage, a plurality of drivers, and a flexure. The plurality of drivers are disposed under a first side and a second side of the stage spaced apart in a first direction, and the drivers are configured to move the stage. The flexure is disposed on the second side of the stage, the first side is rigid, and the flexure is configured to compensate for a positional shift of the stage by varying its structure in response to distortion of the stage.
Claims20
A positioning system comprising:
- a stage;
- a plurality of drivers disposed under a first side and a second side of the stage spaced apart in a first direction, wherein the drivers are configured to move the stage;
- and
- a flexure disposed on the second side of the stage, wherein the first side is rigid, and the flexure is configured to compensate for a positional shift of the stage by varying a structure of the flexure in response to distortion of the stage.
1 more element
A laser processing apparatus comprising:
- a laser source;
- and
- a positioning system disposed apart from the laser source, the positioning system comprising:
- a stage;
- a plurality of drivers disposed under a first side and a second side of the stage spaced apart in a first direction, wherein the drivers are configured to move the stage;
- and
- a flexure disposed on the second side of the stage, wherein the first side is rigid, and the flexure is configured to compensate for a positional shift of the stage by varying a structure of the flexure in response to distortion of the stage.
4 more elements
Dependencies are inferred from the claim text.