Material processing by turbo burst ultrafast laser pulse
AssigneeApplied Materials, Inc.
InventorS. Abbas HOSSEINI
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Abstract
A system for scribing a transparent material includes a laser and a lens assembly. The laser is configured to output laser pulses at one or more pulse repetition rates in a range from 1 MHz to 1000 GHz. The lens assembly is positionable across a top surface of the transparent material and is configured to focus the laser pulses into the transparent material. The focused laser pulses induce optical breakdown of the transparent material in a region within the transparent material that overlaps a bottom surface of the transparent material, thereby facilitating scribing of the transparent material.
Claims20
A system for scribing a transparent material, the system comprising:
- a laser that is configured to output laser pulses that pulse at one or more pulse repetition rates that are in a range from 1 MHz to 1000 GHz;
- and
- a lens assembly positionable across a top surface of the transparent material, wherein the lens assembly is configured to focus the laser pulses to induce optical breakdown of the transparent material in a region within the transparent material that overlaps a bottom surface of the transparent material.
A system for scribing a transparent material, the system comprising:
- a laser that is configured to output a plurality of first laser pulses, a plurality of second laser pulses, and a plurality of third laser pulses, wherein each of the plurality of first laser pulses comprises a subset of the plurality of second laser pulses, and wherein each of the plurality of second laser pulses comprises a subset of the plurality of third laser pulses;
- and
- a lens assembly positionable across a top surface of the transparent material, wherein the lens assembly is configured to focus the laser pulses to induce optical breakdown of the transparent material in a region within the transparent material that overlaps a bottom surface of the transparent material.
Dependencies are inferred from the claim text.