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US 2026/0273597 A1Published application
Washing apparatus
AssigneeEbara Corporation
InventorsDAICHI KONDO, KOJI MAEDA, KUNIAKI YAMAGUCHI, KOICHI FUKAYA, KOHEI SATO
Life of this patent
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Abstract
A washing apparatus includes a housing; a holding part that holds a substrate arranged in the housing; a washing nozzle that supplies a washing liquid to the substrate held by the holding part; a gas nozzle that ejects a gas toward a ceiling of the housing; and a control part that controls the gas nozzle. The control part causes the gas to be ejected from the gas nozzle after the substrate is transported into the housing and before washing of the substrate is performed.
Claims4
A washing apparatus comprising:
- a housing;
- a holding part that holds a substrate arranged in the housing;
- a washing nozzle that supplies a washing liquid to the substrate held by the holding part;
- a gas nozzle that ejects a gas toward a ceiling of the housing;
- and
- a control part that controls the gas nozzle,
- wherein the control part causes the gas to be ejected from the gas nozzle after the substrate is transported into the housing and before washing of the substrate is performed.
4 more elements
Dependencies are inferred from the claim text.