Ultrasonic transducer, a method for transmitting of an ultrasound wave, and a method for detecting of an ultrasound wave
AssigneeImec Vzw
InventorsSamer HOURI, Rachid HAOUARI
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AssigneeImec Vzw
InventorsSamer HOURI, Rachid HAOUARI
Estimating the term…
An ultrasonic transducer comprising: a substrate comprising a frontside configured to face an external medium for propagation of an ultrasound wave; and a membrane arranged to be suspended at a distance from a cavity surface of the substrate for defining a cavity between the membrane, the cavity surface, and at least one cavity wall, wherein the membrane is configured to transversally vibrate; wherein the ultrasonic transducer comprises a venting hole at the frontside and a venting channel configured to connect the cavity to the venting hole; wherein the transducer has an acoustic resonance frequency and the membrane has a membrane resonance frequency, and wherein the ultrasonic transducer is configured to provide transduction for the ultrasound wave having a frequency corresponding to the acoustic resonance frequency.
An ultrasonic transducer comprising:
A method for transmitting of an ultrasound wave, said method comprising:
A method for detecting of an ultrasound wave, said method comprising:
Dependencies are inferred from the claim text.