Robot arm with vacuum-compatible seals and internal cooling flow paths
AssigneeLam Research Corporation
InventorRichard M. Blank
Life of this patent
Estimating the term…
Abstract
This disclosure describes robot arm assemblies for use in vacuum environments. Such robot arm assemblies may feature one or more rotational joints that have ferrofluidic seals or other vacuum-compatible seals. Coolant flow path segments may be provided that pass through one or more of the one or more rotational joints so as to allow coolant to be circulated through one or more cooling features located within the robot arm assembly, thereby allowing components within the robot arm assembly, e.g., motors, ferrofluidic seals, sensors, etc., to be actively cooled.
Claims28
An apparatus comprising:
- a robot arm base;
- a robot arm assembly including one or more arm links and a first set of one or more rotational joints, each rotational joint of the first set of one or more rotational joints including a corresponding vacuum-compatible seal;
- components defining a plurality of coolant flow path segments;
- and
- a first set of one or more cooling features, each cooling feature in the first set of one or more cooling features fluidically connected with, and fluidically interposed between, at least two of the coolant flow path segments, wherein:
- a base rotational joint of the one or more rotational joints rotatably connects a first arm link of the one or more arm links to the robot arm base, and
- at least two of the coolant flow path segments extend from the robot arm base, through the base rotational joint, and into at least the first arm link.
(canceled)
(canceled)
(canceled)
(canceled)
(canceled)
(canceled)
(canceled)
(canceled)
Dependencies are inferred from the claim text.