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US 2026/0271663 A1Published application
Passage chamber
AssigneeSamsung Display Co., Ltd.
InventorsIl Seob YOON, Min Kook AHN, Suk Ha RYU, Byung Gyu CHAE
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Abstract
A passage chamber includes a chamber body in which a substrate is to be accommodated, a heater arranged inside the chamber body, and a vacuum pump arranged at the chamber body, and the vacuum pump includes a pump body connected to an inside of the chamber body, a mesh layer arranged between an inside of the chamber body and the pump body, and a protective cap covering the mesh layer inside the chamber body.
Claims20
A passage chamber comprising:
- a chamber body in which a substrate is to be accommodated;
- a heater arranged inside the chamber body;
- and
- a vacuum pump arranged at the chamber body,
- wherein the vacuum pump comprises:
- a pump body connected to an inside of the chamber body;
- a mesh layer arranged between the inside of the chamber body and the pump body;
- and
- a protective cap covering the mesh layer inside the chamber body.
6 more elements
Dependencies are inferred from the claim text.