Control device, control method, and program

A control method executed by a computer that controls a mounting apparatus including:

• a drive unit that changes a position of a mount portion that mounts a second member on a first member;
• a control unit that controls the drive unit;
• a machine base that accommodates the drive unit and the control unit;
• a leg that is connected to the machine base and supports the machine base with respect to a floor;
• and a storage that stores:
• an ideal model that mathematically expresses a behavior of the mounting apparatus without considering stiffness of the floor;
• a control model that converts a command value for the drive unit to change the position of the mount portion to a target position into a first command value suitable for input to the ideal model;
• and a difference suppression model that outputs a second command value for reducing, to zero, a difference between the position of the mount portion obtained when the first command value is input to the ideal model and the position of the mount portion when the control unit controls the drive unit based on the first command value,
• the control method comprising a calculation step of calculating a third command value obtained by adding the second command value to the first command value and outputting the third command value to the control unit, wherein
• the control unit controls the drive unit based on the third command value that has been output.