Resonator coil pitch adjustment systems and methods
AssigneeApplied Materials, Inc.
InventorsJason M. Schaller, Wai Ming Tam, William Herron Park, JR., David T. Blahnik, Michael C. Simmons
Life of this patent
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Abstract
The present subject matter relates to systems and methods for adjusting the resonant frequency of a resonator coil that is disposed within an enclosure. An adjustable coupling arrangement couples a first end of the resonator coil to the enclosure. The adjustable coupling arrangement is movable to adjust a position of the first end of the resonator coil with respect to the enclosure such that a pitch of the resonator coil is modified.
Claims18
A resonator comprising:
- an enclosure;
- a resonator coil disposed within the enclosure and configured to deliver a high voltage RF signal from a power input to a power output;
- and
- an adjustable coupling arrangement coupling a first end of the resonator coil to the enclosure;
- wherein the adjustable coupling arrangement is movable to adjust a position of the first end of the resonator coil with respect to the enclosure such that a pitch of the resonator coil is modified.
An adjustable coupling device for coupling an end of a resonator coil to an enclosure, the device comprising:
- a coupling housing comprising a channel that extends therethrough;
- an adjustment actuator configured to engage the end of the resonator coil;
- wherein the end of the resonator coil is configured to extend through the channel;
- wherein the adjustment actuator is selectively movable to cause the end of the resonator coil to translate along the channel.
A method for adjusting the resonant frequency of a resonator coil, the method comprising:
- positioning a resonator coil within an enclosure, wherein the resonator coil is configured to deliver a high voltage RF signal from a power input to a power output;
- coupling a first end of the resonator coil to the enclosure using an adjustable coupling arrangement;
- selectively moving the adjustable coupling arrangement to adjust a position of the first end of the resonator coil with respect to the enclosure such that a pitch of the resonator coil is modified.
Dependencies are inferred from the claim text.