Acoustic wave resonator, acoustic wave filter, and multiplexer
AssigneeMurata Manufacturing Co., Ltd.
InventorsToshiki TABEI, Tomohisa KOMURA
Life of this patent
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Abstract
An acoustic wave resonator includes first and second IDT electrodes on a piezoelectric substrate, and first to fourth reflection electrodes. The first IDT electrode includes first and second electrode fingers and first and second busbar electrodes. The second IDT electrode includes third and fourth electrode fingers and third and fourth busbar electrodes. The first and second reflection electrodes and the third and fourth reflection electrodes respectively sandwich the first and second IDT electrodes. Electrode fingers located outermost in the first IDT electrode, and electrode fingers located outermost in the second IDT electrode are respectively connected to the first to fourth reflection electrodes.
Claims20
An acoustic wave resonator comprising:
- a piezoelectric substrate;
- a first interdigital transducer (IDT) electrode and a second IDT electrode on the piezoelectric substrate;
- and
- a first reflection electrode, a second reflection electrode, a third reflection electrode, and a fourth reflection electrode;
- wherein
- the first IDT electrode includes:
- a plurality of first electrode fingers and a plurality of second electrode fingers parallel to each other;
- and
- a first busbar electrode and a second busbar electrode;
- the first busbar electrode connects one end of each of the plurality of first electrode fingers to each other;
- the second busbar electrode connects one end of each of the plurality of second electrode fingers to each other;
- respective other ends of the plurality of first electrode fingers face the second busbar electrode;
- respective other ends of the plurality of second electrode fingers face the first busbar electrode;
- the second IDT electrode includes:
- a plurality of third electrode fingers and a plurality of fourth electrode fingers parallel to each other;
- and
- the second busbar electrode and a third busbar electrode;
- the second busbar electrode connects one end of each of the plurality of third electrode fingers to each other;
- the third busbar electrode connects one end of each of the plurality of fourth electrode fingers to each other;
- respective other ends of the plurality of third electrode fingers face the third busbar electrode;
- respective other ends of the plurality of fourth electrode fingers face the second busbar electrode;
- the first reflection electrode and the second reflection electrode sandwich the first IDT electrode in a first direction intersecting an extending direction of the plurality of first electrode fingers;
- the third reflection electrode and the fourth reflection electrode sandwich the second IDT electrode in a second direction intersecting an extending direction of the plurality of third electrode fingers;
- at least one of two electrode fingers located outermost in the first direction among the plurality of first electrode fingers and the plurality of second electrode fingers is connected to at least one of the first reflection electrode and the second reflection electrode;
- and
- at least one of two electrode fingers located outermost in the second direction among the plurality of third electrode fingers and the plurality of fourth electrode fingers is connected to at least one of the third reflection electrode and the fourth reflection electrode.
Dependencies are inferred from the claim text.