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US 2026/0269806 A1Published application
Resonator Device
AssigneeSeiko Epson Corporation
InventorsJunichi TAKEUCHI, Koji HOSAKA, Yukihiro HASHI, Takuya OWAKI, Ryo ICHIKAWA
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Abstract
A resonator device includes a semiconductor substrate having a first surface and a second surface being opposite to each other, a resonator that is bonded to the first surface and includes a resonator element and a container housing the resonator element, an integrated circuit portion that is formed on the second surface and includes an oscillation circuit electrically connected to the resonator element, and mounting terminals connected to the integrated circuit portion.
Claims9
A resonator device comprising:
- a semiconductor substrate having a first surface and a second surface being opposite to each other;
- a resonator that is bonded to the first surface and includes a resonator element and a container housing the resonator element;
- an integrated circuit portion that is formed on the second surface and includes an oscillation circuit electrically connected to the resonator element;
- and
- mounting terminals connected to the integrated circuit portion.
2 more elements
Dependencies are inferred from the claim text.