Antenna array and method for producing it

Abstract

An antenna array and a method for producing it are disclosed. The antenna array has a first substrate made of an inorganic material, a gas-filled cavity formed in a first main surface of the first substrate and extending into the first substrate in the direction of a second main surface of the first substrate, which is opposite the first main surface, wherein a conductive layer is arranged on a bottom and a side wall of the gas-filled cavity, a second substrate made of a non-conductive inorganic material, which is arranged above the first main surface of the first substrate, and a plurality of antenna elements arranged on a main surface of the second substrate facing away from the first substrate such that at least one antenna element of the plurality of antenna elements is arranged above the gas-filled cavity.

Dependencies are inferred from the claim text.